With the advancement of semiconductor
manufacturing technology, nanotechnology has become a basic requirement for
many new technologies, and the evolution of each new process is not only the semiconductor
manufacture’s own technical strength, but also collaboration with equipment
manufacturers and material vendors as the semiconductor supply chain
partnership. In the multiple steps of the semiconductor manufacturing process,
the purity of the gas is a key variable that affects wafer yield. As wafers
become more and more sensitive to molecular contamination, the use of gas
purifiers not only continues to increase, but also provides stable gas quality
and it becomes the key to the yield of advanced processes.
The need for gas purification comes from three main factors. First of all, the method of gas production and delivery cannot provide consistent gas quality, and some key processes require the purest gas. In these cases, some purification steps need to be taken to remove trace impurities in the gas. Secondly, when the gas purity is transported from the original production plant to the end of use, due to the complicated gas pipeline system, it will be difficult to ensure that a consistent gas purity is maintained during the transport process. The best way to improve these two variables is use a gas purifier to remove impurities before the gas enters the end of use. Lastly, the gas purifier provides insurance against possible gas contamination risks and eliminates variables that may cause inconsistent wafer yields.
Flow range from 30 to 20,000 Nm3/Hr. Auto-Regenerable Gas Purifier.
Major Media: Granular Hollow Fiber.
Flow range from 100 to 500 slpm. Auto-Regenerable Gas Purifier.
Major Media: Granular Hollow Fiber.
Flow range from 0.5 to 2,000 slpm. Offline Regenerable.
Major Media: Catalyst / Molecular / GHF.
Flow range from 10 to 100 Nm3/Hr.
Major Media: Getter Alloy
Flow range from 1 to 150 slpm.
Major Media: Getter Alloy
Flow range from 100 to 3,000 Nm3/Hr.
Major Media: Granular Hollow Fiber
What is Hollow Fiber?
Adsorbent Granular Hollow Fiber is made from porous materials such as molecular sieves, zeolites, natural zeolite, and so on. During the synthesis process, the precursor or raw material slurry or Sub-powder is added into a mixture with high temperature polymer and goes through the phase inversion process to form the Granular Hollow Fibers.
The adsorption behavior is the same as physical or chemical adsorption. The major difference is masst-ransfer-resistance. The absorbent Granular Hollow Fiber has much lower mass-transfer- resistance than commercial pellet adsorbent.