With the advancement of semiconductor manufacturing technology, nanotechnology has become a basic requirement for many new technologies, and the evolution of each new process is not only the semiconductor manufacture’s own technical strength, but also collaboration with equipment manufacturers and material vendors as the semiconductor supply chain partnership. In the multiple steps of the semiconductor manufacturing process, the purity of the gas is a key variable that affects wafer yield. As wafers become more and more sensitive to molecular contamination, the use of gas purifiers not only continues to increase, but also provides stable gas quality and it becomes the key to the yield of advanced processes.  

The need for gas purification comes from three main factors. First of all, the method of gas production and delivery cannot provide consistent gas quality, and some key processes require the purest gas. In these cases, some purification steps need to be taken to remove trace impurities in the gas. Secondly, when the gas purity is transported from the original production plant to the end of use, due to the complicated gas pipeline system, it will be difficult to ensure that a consistent gas purity is maintained during the transport process. The best way to improve these two variables is use a gas purifier to remove impurities before the gas enters the end of use. Lastly, the gas purifier provides insurance against possible gas contamination risks and eliminates variables that may cause inconsistent wafer yields.