FABTRON, FT1
The AUTO-REGENERABLE TYPE GAS PURIFIER
Targeted for semiconductor fabs, display manufacturers and gas plants, Tronic Purity’s technically advanced FABTRON® line is the only electronic-grade gas purification system without consumable parts in the industry that serves and provides our customers with a solution that is extremely cost effective while consistently delivering sub-ppb level purification performance.
Utilizing Tronic Purity’s revolutionary “Granular Hollow Fiber” technology, the FABTRON® series is effortlessly operable at room temperature when processing at large flow rates ranging from 10 Nm3/hr to 20,000 Nm3/hr. With its 12-inch Human Machine Interface (HMI) and a programmable logic controller (PLC), the FABTRON® purifiers can immediately carry out purification and regeneration procedures automatically upon set-up with no consumables needed, offering industrial manufacturers an economical way of production.
10 ~ 20,000 Nm3/Hr.
Auto-Regenerable Type Purifier.
Applications:
ü Semiconductor.
ü TFT / LCD.
ü Solar, PV.
ü LED.
FLOW RATES
GAS PURIFY
Gas Purified:
ü N2 (Nitrogen)
ü Ar (Argon)
ü He (Helium)
ü CO2 (Carbon Dioxide)
Gas Purify:
Impurities Removed
ü H2O, O2, CO, CO2, H2, CH4 and NMHC to < 1 ppbv.
ü H2O, O2, CO, CO2, H2, CH4 and NMHC to < 1 ppbv.
ü H2O, O2, CO, CO2, H2, CH4 and NMHC to < 1 ppbv.
ü H2O, O2, CO, H2, CH4 and NMHC to < 1 ppbv.
STANDARD FEATURES
Controller:
ü Fully Automated Controller by Programmable Logic Controller.
ü 12” Touchable Human Machine Interface.
ü MODBUS or PROFINET Communication Port, RJ45 connection.
ü Remote Shut Down.
Gas Panel & Hardware:
ü Inlet and Outlet Analytical Port.
ü Over Pressure Relief Valves.
ü Metal Enclosure.
OPTIONAL FEATURES
Gas Devices:
ü Manual Inlet Isolation Valve.
ü Manual Outlet Isolation Valve.
ü Auto Bypass Valve.
ü Manual Bypass Valve.
ü Inlet Mass Flow Meter.
ü Inlet and Outlet Pressure Transmitters.
ü Instrument Air Management System with an I.A. Reservoir.
ü 0.003µm Particle Filter, Teflon.
ü 0.003µm Particle Filter, Metal.
ü Purifier Fixed Bolster Brackets.
ü CE Marking.
Optional Features:
Eelectrical:
ü Separate Control Power, 110 VAC, 120W
ü Separate Control Power, 220 VAC, 120W
ü UPS For Separate Control Power.
ü Emergency Off Button (EMO).
ü Alarm Light Tower.
ü Outdoor Enclosure.
ü MODBUS Protocol, RJ45 Connection.
ü PROFINET Protocol, RJ45 Connection.
ü Analog Signal Output Interface.
* Mass Flow Meter 4-20 mA Signal Output.
* Pressure Transducers 4~20 mA Signal Output.
*Common Alarm Relay, N.C.
ü Gas Relay Indicating Purifier Status, N.C.