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PURETRON Series Analyzer

Ultra-High Purity electronic gas analyzer.

The Atmospheric Pressure Ionization Mass Spectrometry

AbOUT THE HP-9000, API-MS

The Tronic Purity, hp-9000 API-MS line stands out as the top choice for continuous quality control of bulk gases in the semiconductor and electronics industries, thanks to its advanced atmospheric pressure ionization mass spectrometry (API-MS) technology. This system combines high-performance ionization, cutting-edge electronics, and powerful process analysis software. API-MS offers a cost-effective solution compared to traditional quality control methods, enabling the monitoring of various potential contaminants in bulk gases with detection limits that are up to 100 times better than other technologies.

The APIMS line delivers comprehensive impurity analysis, including detection of substances like H2, CO, CO2, H2O, O2, CH4, Kr, and Xe, among others. As 300 mm wafer manufacturing demands stricter gas quality standards, this technology remains the preferred choice for detecting impurities at parts per trillion (ppt) levels.

what is the API-MS

The ultra-high purity electronic gas market depends on high-quality gases to optimize yields. The Tronic Purity hp-9000 API-MS Gas Analyzer line, known for its innovation, power, and cost-effectiveness, provides rapid and precise monitoring of impurities at ppt levels. The exceptional performance of the hp-9000 analyzer has made this renowned atmospheric pressure ionization mass spectrometer (API-MS) the preferred choice for continuous quality control of bulk gases.

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hp-9000, the API-MS
Gas Analysis Applications
  • UHP Nitrogen
  • UHP Argon
  • UHP Helium
  • UHP Hydrogen
Features

• Fast online measurement (2 min analysis cycle time) enables immediate response to gas supply upset conditions.

• Superior sensitivity with lower detect ion capability of <10 ppt provides gas analysis suitable for the most stringent quality requirements.

General Specifications

Measurement Method:

1x triple filter

Mass Range:

1-300 AMU

Ion Source Type:

Ion Source Type Atmospheric pressure ionization

Ion Source Background:

Less than 1 ppt

Amplifier and Dynamic Range:

100 MHz pulse counting type

Detector:

Pulse counting channel electron multiplier

Detection Noise:

10 counts in 106

Detection Limit:

< 10 ppt (component dependent)

Analysis Time (typical):

< 1 second per component

Stream Switching Time (typical):

15 minutes to < 1 ppb

Bulk Gas Suitability:

N2, Ar, He, H2.

Sample Gas Inlet Connections:

1/4" MVCR for N2, Ar and He gases.

1/4" FVCR for H2.

Optional Feature: Supports up to four (4) sample streams with automatic selection of the active stream.

Sample Gas Outlet Connection:

1/4" MVCR.

Span Calibration Gas Connection:

1/4" MVCR.

Vent Pump Connection:

1/2" SWG.

Instrument Air Connection:

1/4" SWG.

Vacuum Exhaust Connection:

4" duct.

Communication Connections:

Ethernet, RJ-45.

Impurities Monitored:

HO2, CO, CO2, H2O, O2, CH4, Kr, and Xe.

(other impurities available)

Dimensions:

Height: 2,000 mm x Width:880 mm x Depth:650 mm.

Input Power:

110 VAC, 1P+E. or 220 VAC, 1P+E.